Fringe Coefficients
Z02: 554 nm X Tilt (1, 1)
Z03: 494 nm Y Tilt (1, -1)
Z04: 944 nm Defocus (2, 0)
Z05: 623 nm Primary Astig at 45° (2, -2)
Z06: 290 nm Primary Astig at 0° (2, 2)
Z07: 347 nm Primary Y Coma (3, -1)
Z08: 370 nm Primary X Coma (3, 1)
Z09: 371 nm Y Trefoil (3, -3)
Z10: 164 nm X Trefoil (3, 3)
Z11: 287 nm Primary Spherical (4, 0)
Z12: 189 nm Secondary Astigmatism at 0° (4, 2)
Z13: 342 nm Secondary Astigmatism at 45° (4, -2)
Z14: 232 nm X Tetrafoil (4, 4)
Z15: 371 nm Y Tetrafoil (4, -4)
Z16: 664 nm Secondary X Coma (5, 1)
Z17: 367 nm Secondary Y Coma (5, -1)
Z18: 287 nm Secondary X Trefoil (5, 3)
Z19: 580 nm Secondary Y Trefoil (5, -3)
Z20: 91.6 nm X Pentafoil (5, 5)
Z21: 334 nm Y Pentafoil (5, -5)
Z22: 263 nm Secondary Spherical (6, 0)
Z23: 532 nm Tertiary Astigmatism at 45° (6, -2)
Z24: 311 nm Tertiary Astigmatism at 0° (6, 2)
Z25: 252 nm Secondary X Trefoil (6, -4)
Z26: 265 nm Secondary Y Trefoil (6, 4)
Z27: 212 nm Y Hexafoil (6, -6)
Z28: 246 nm X Hexafoil (6, 6)
Z29: 189 nm Tertiary Y Coma (7, -1)
Z30: 294 nm Tertiary X Coma (7, 1)
Z31: 374 nm Tertiary Y Trefoil (7, -3)
Z32: 275 nm Tertiary X Trefoil (7, 3)
Z33: 283 nm Secondary Y Pentafoil (7, -5)
Z34: 339 nm Secondary X Pentafoil (7, 5)
Z35: 214 nm Y Heptafoil (7, -7)
Z36: 427 nm X Heptafoil (7, 7)
Z37: 129 nm Tertiary Spherical (8, 0)
Z38: 0.0234 nm
Z39: 88.4 nm
Total RMS: 822 nm